EE5439



Micro/Nano Electromechanical Systems

This course presents the fundamentals of Microelectromechanical Systems (MEMS) Nanoelectromechanical Systems (NEMS), culminating in advanced concepts and applications. Major topics covered include electrostatic actuation and capacitive sensing, piezoelectric actuation and sensing, thermal actuation and sensing, optical MEMS devices and nanophotonics, CMOS MEMS devices, inertial sensors, RF MEMS devices, resonators and clocking, NEMS sensors, energy harvesters, and packaging technology.

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