Micro-Fabrication Processes

This module enables students to learn the micromachining of both Silicon and non-Silicon materials. The major topics include the basic micro-fabrication as well as the micro-machining processes for microsystems. Some of the processes to be covered: Bulk Processes; Surface Processes; Sacrificial Processes and Bonding Processes; Micro-machining based on conventional machining processes; Micro-machining based on non-conventional machining processes; Special machining; The module is targeted at students seeking to specialise in the Microsystems Technology.

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