PC3242



Physics of Semiconductor Processing

The module discusses the physics of material processing techniques in semiconductor industry, in particular diffusion, ion implantation, oxidation/dielectric layers, epitaxy, thin film deposition and characterization, lithography and etching. The limitation and future development of current microelectronic technology, processing and application of nano-structured materials, as well as opto-electronic device fabrication will also be discussed. This module is designed for physics and materials science students who are interested in working in semiconductor manufacturing and related areas.

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